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Latest Blog Posts
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Blog
Dynamic Reverse Pulsing – What About the Anode?
December 04, 2023
A previous AE blog, Dynamic Reverse Pulsing – What About Duty Cycle?, discussed reactive sputter deposition of insulating thin films in large-area coaters, describing the benefits of using the Dynamic Reverse Pulse (DRP) power-delivery mode over the bipolar (BP) mode of dual magnetron sputtering. In DRP mode , dual targets are bipolar pulsed against an explicit anode and the duty cycle can be varied so that the polarity is positive on the target for a shorter time during pulsing. This allows clearing of charge build-up on the targets. In our studies, DRP mode showed increased deposition rate and reduced substrate temperature when compared to similar depositions with the BP mode.
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Blog
CT Imaging: Navigating the Complex Power Needs of Current and Next Generation CT Systems
October 09, 2023
Computed Tomography (CT) is a computerized imaging technique used in radiology. A rapidly rotating X-ray beam and detector are used to generate cross-sectional images – so-called slices – that form the volumetric and very detailed internal image of the body.
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Blog
Fine-Tuning for the Future: Enhancing Plasma Processes with Impedance Matching Networks
December 14, 2023
In the realm of semiconductor manufacturing, where precision and control are paramount, RF impedance matching networks play a critical role. These networks act as a bridge between the plasma source and the process chamber, optimizing power transfer and ensuring stable and efficient semiconductor processes.
Blog
Dynamic Reverse Pulsing – What About the Anode?
December 04, 2023
A previous AE blog, Dynamic Reverse Pulsing – What About Duty Cycle?, discussed reactive sputter deposition of insulating thin films in large-area coaters, describing the benefits of using the Dynamic Reverse Pulse (DRP) power-delivery mode over the bipolar (BP) mode of dual magnetron sputtering. In DRP mode , dual targets are bipolar pulsed against an explicit anode and the duty cycle can be varied so that the polarity is positive on the target for a shorter time during pulsing. This allows clearing of charge build-up on the targets. In our studies, DRP mode showed increased deposition rate and reduced substrate temperature when compared to similar depositions with the BP mode.
Blog
Top 5 Takeaways from OCP 2023
November 16, 2023
Last month marked our 6th year of engagement and partnership with the OCP community through the OCP Global Summit, which took place on Oct. 17 – 19 in San Jose, Calif. Our journey started with the ORv2 12V power shelf, and we’re now transitioning towards the next-generation 48V ORv3 power shelf.
Blog
Sputter Deposition of Indium Tin Oxide: To Pulse or Not to Pulse
October 30, 2023
Sputter deposition characteristics of indium tin oxide (ITO) from compound targets for applications as a transparent conductive oxide (TCO) have been widely investigated to find deposition processes that optimize film properties
Blog
Powering Electrosurgery: Precise Control and Delivery of RF Energy
October 23, 2023
Medical applications have made use of radio frequency (RF) energy in the form of electromagnetic waves or electrical currents for over 125 years. The ability to transect and seal vessels and tissue effectively and safely, for example, is a critical surgical task with RF-based techniques being the gold standard for cutting and cauterizing.
Blog
Dynamic Reverse Pulsing – What About Duty Cycle?
October 16, 2023
A previous blog showed that Dynamic Reverse Pulsing (DRP) mode offers several benefits to reactive sputtering of SiO2 through the reduction of substrate heat load by about 12% and delivered a 10% increase in deposition rate when compared to conventional bipolar pulsed (BP) dual-magnetron sputtering. DRP mode halves the power applied to each magnetron and shares the pulsing with an explicit anode,
Blog
CT Imaging: Navigating the Complex Power Needs of Current and Next Generation CT Systems
October 09, 2023
Computed Tomography (CT) is a computerized imaging technique used in radiology. A rapidly rotating X-ray beam and detector are used to generate cross-sectional images – so-called slices – that form the volumetric and very detailed internal image of the body.
