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Implant
As chip designs evolve in complexity, the need for precise control over implanted ions increases. AE power products are engineered with a focus on optimizing efficiency and power density to ensure precise control of ion energy.
Precision Power for Impeccable Ion Implantation
With the ever-increasing complexity of chip designs, ion implantation is a crucial step that helps to regulate the electrical properties of different circuits. Advanced Energy's power products optimize efficiency and power density for precise ion energy control. Our portfolio of AC/DC and DC/DC front-end solutions covers a wide output power range, with options for both 12 and 48 V output voltage. We also offer a variety of industry-standard board-mounted power modules that are extensively used by OEMs and system integrators.
Featured Products
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Featured Resources
HVPS Overview Brochure
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OLH10K Series Data Sheet
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HiTek Power OLS10KD Series Data Sheet
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Electrostatic Semiconductor Wafer Clamping/Chucking System (ESC) Application Note
The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing.
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