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Ascent AMS II Pulsed and DC Power System

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Stable, Repeatable Power | Water Cooling | Embedded IoT intelligence

New materials and cathode designs increasingly challenge process stability and film repeatability. At the same time, larger deposition areas heighten power requirements and potential arc-related damage. Ascent® AMS II provides stable, repeatable power regardless of process setup or conditions. Its Arc Management System™ (AMS) technology and onboard, embedded IoT intelligence maximize productivity and throughput. This low-noise, water-cooled design with expanded operating range also increases reliability, process capability, and installation flexibility.

特徴

  • Water cooling
  • Modular and scalable
  • Embedded PowerInsight by Advanced Energy™ IoT intelligence
  • Wide mains voltage range
  • Expanded operating range
  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc-Sync™ technology — primary/secondary up to 12 units
  • Ethernet, EtherCAT®, Profibus, RS-232/485, Ethernet/IP, and analog communications

メリット

  • High film quality and throughput
  • Reduced film, substrate, and equipment damage
  • Stable throughput and power delivery
  • Easy integration and control
  • Fast scaling to achieve high power levels

仕様

冷却: Hybrid (air and water)
出力周波数(MHz、kHz): 0.5 to 5 kHz
入力電圧 (V): 400, 440, 480 VAC
出力レベル(kW): 30 to 60 kW
ラック幅: Full rack
高さ(インチ): 6U
出力電圧範囲 (V): 400-1000 V
通信インターフェース: Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
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Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

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